Extreme Ultraviolet Broadband Imaging Spectrometer Using Dispersion-matched Zone Plates

We present simultaneous 1D imaging and broadband spectroscopy of a laser-produced plasma source of extreme ultraviolet light, using a tapered zone plate that is matched to the dispersion of a transmission grating. We describe the design and fabrication of the zone plates in the 5-80 nm wavelength regime with designed spatial resolution of ~10 μm and spectral resolution of ~0.8 nm. Subsequently, we benchmark the imaging spectrometer with a solid tin target laser-produced plasma. Plane wave propagation simulations qualitatively match the experimental results and confirm the device performance.