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Fabrication of a 3D mode size converter for efficient edge coupling in photonic integrated circuits

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posted on 2024-11-27, 17:00 authored by Hyeong-Soon Jang, Hyungjun Heo, Sangin Kim, Hyeon Hwang, Hansuek Lee, Min-Kyo Seo, Hyounghan Kwon, Sang-Wook Han, Hojoong Jung
We demonstrate efficient edge couplers by fabricating a 3D mode size converter on a lithium niobate-on-insulator photonic platform. The 3D mode size converter is fabricated using an etching process that employs a Si external mask to provide height variation and adjust the width variation through tapering patterns via lithography. The measured edge coupling efficiency with a 3D mode size converter was approximately 1.16 dB/facet for the TE mode and approximately 0.71 dB/facet for the TM mode at a wavelength of 1550 nm.

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