High sensitivity magnetic field sensor via sandwich type PDMS resonator

The sandwich structure as the core layer of PDMS resonator is proposed for single-axis magnetic sensor with high sensitivity. The small Young's modulus of flexible material corresponds to larger variation, resulting in a highly sensitive magnetic response. The sandwich structure pre-set magnetic field provides directional sensing feature. The experimental results show that the redshift sensitivity of 1.08 nm/mT and the blueshift sensitivity of 1.12 nm/mT in the unshielded environment, which is attributed to slight variation in PDMS Young's modulus. At 1.4 kHz, a minimum detectable magnetic field of 0.96 nT Hz-1/2 is realized.