Increasing the Precision of Transmission Spectroscopy by Optimization of Thin Film Surface Shapes

Bass, John; Matito, Manuel Ballester; Fernández, S; Katsaggelos, Aggelos; Marquez, Emilio; Willomitzer, Florian

doi:10.1364/opticaopen.26170123.v1

Increasing the Precision of Transmission Spectroscopy by Optimization of Thin Film Surface Shapes

https://doi.org/10.1364/opticaopen.26170123

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posted on 2024-07-04, 10:14 authored by John Bass, Manuel Ballester Matito, S Fernández, Aggelos Katsaggelos, Emilio Marquez, Florian Willomitzer

While thin film transmission spectroscopy systems can measure semiconductor optical properties, the utilized optimization-based evaluation methods often introduce variances in the results. We introduce a method of optimizing film surface shapes that reduces this uncertainty.

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115353

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spectroscopy thin film diffraction simulation inverse synthesis optimization semiconductor

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Optica Publishing Group Non-Exclusive License

Increasing the Precision of Transmission Spectroscopy by Optimization of Thin Film Surface Shapes

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