Mechano-optical metasurfaces

Tunable metasurfaces enable active and on-demand control over optical wavefronts through reconfigurable scattering of resonant nanostructures. Here, we present novel insights inspired by mechanical metamaterials to achieve giant tunability in mechano-optical metasurfaces where the mechanical metamaterial and optical metasurfaces are integrated in a single nanopatterned material. In a first design, judiciously engineered cuts in a flexible substrate enable large, strain-induced extension of the inter-particle spacing, tuning a high quality-factor resonance in a silicon nanoparticle array across a very broad spectral range. In a second design, we eliminate the substrate and demonstrate a nanopatterned silicon membrane that simultaneously functions as a mechanical metamaterial and an optical metasurface with large tunability. Our results highlight a promising route toward active metasurfaces, with potential applications in tunable filters, reconfigurable lenses, and dynamic wavefront shaping.