MoS2 Based 2D Material Photodetector Array with high Pixel Density

Arrays of photodetector-based pixel sensors are ubiquitous in modern devices, such as smart phone cameras, automobiles, drones, laptops etc. Two dimensional (2D) material-based photodetector arrays are a relevant candidate, especially for applications demanding planar formfactors. However, shortcomings in pixel density and prototyping without cross contamination limit technology adoption and impact. Also, while 2D material detectors offer high absorption, graphene's closed bandgap results in undesirably high dark currents. Here, we introduce the experimental demonstration of dense planar photodetector arrays. We demonstrate a micrometer narrow pitched 2D detector pixels and show this approach's repeatability by verifying performance of a 16-pixel array. Such dense and repeatable detector realization is enabled by a novel, selective, contamination free 2D material transfer system, that we report here in automated operation. The so realized photodetectors responsivity peaks at 0.8 A/W. Furthermore, we achieve uniform detector performance via bias voltage tuning calibration to maximize deployment. Finally, we demonstrate 2D arrayed photodetectors not only on a silicon chip platform but also demonstrate and very array performance on flexible polymer substrates. Densely arrayed, flat, bendable, and uniform performing photodetector pixels enable emerging technologies in the space where lightweight and reliable performance is required, such as for smart phones and emerging AR/VR markets, but smart gadgets, wearables, and for SWAP constrained aviation and space platforms.