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On-chip erbium-doped lithium niobate waveguide amplifiers

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posted on 2023-01-11, 22:23 authored by Qiang Luo, Chen Yang, Zhenzhong Hao, Ru Zhang, Dahuai Zheng, Fang Bo, Yongfa Kong, Guoquan Zhang, Jingjun Xu
Lithium niobate on insulator (LNOI), as an emerging and promising optical integration platform, faces shortages of on-chip active devices including lasers and amplifiers. Here, we report the fabrication on-chip erbium-doped LNOI waveguide amplifiers based on electron beam lithography and inductively coupled plasma reactive ion etching. A net internal gain of ~30 dB/cm in communication band was achieved in the fabricated waveguide amplifiers under the pump of a 974-nm continuous laser. This work develops new active devices on LNOI and will promote the development of LNOI integrated photonics.

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