posted on 2023-11-30, 06:49authored byZhiwei Fang, Sanaul Haque, Jintian Lin, Rongbo Wu, Jianhao Zhang, Min Wang, Junxia Zhou, Muniyat Rafa, Tao Lu, Ya Cheng
Cavity optomechanics, the study of the interplay between light and mechanical properties of matter, has triggered a wide range of groundbreaking researches from cavity quantum electrodynamics, label free single molecule detection to the creation of phonon laser. Using femtosecond laser direct writing followed by chemo-mechanical polishing, here we report an ultrahigh quality (Q~10^7) factor lithium niobate (LN) whispering gallery microresonator monolithically integrated with in-plane microelectrodes. Coherent regenerative optomechanical oscillation with an effective mechanical quality (Qm) factor as high as 2.86*10^8 is observed in air. We demonstrate real-time electrical tuning of the optomechanical frequency with an electro-mechanical tuning efficiency around -134 kHz/100V.