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Structured illumination microscopy with extreme ultraviolet pulses

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posted on 2024-03-30, 16:00 authored by R. Mincigrucci, E. Paltanin, J. -S. Pelli-Cresi, F. Gala, E. Pontecorvo, L. Foglia, D. De Angelis, D. Fainozzi, A. Gessini, D. S. P. Molina, O. Stranik, F. Wechsler, R. Heintzmann, G. Ruocco, F. Bencivenga, C. Masciovecchio
The relentless pursuit of understanding matter at ever-finer scales has pushed optical microscopy to surpass the diffraction limit and produced the super-resolution microscopy which enables visualizing structures shorter than the wavelength of light. In the present work, we harnessed extreme ultraviolet beams to create a sub-{\mu}m grating structure, which was revealed by extreme ultraviolet structured illumination microscopy. This achievement marks the first step toward extending such a super-resolution technique into the X-ray regime, where achieving atomic-scale resolution becomes a charming possibility.

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