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Substrate-free THz focal plane metamaterial array with high absorption ratio

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posted on 2023-11-30, 21:06 authored by Zhigang Li, Yi Ou, Xubiao Peng, Jianyu Fu, Wen Ou, Wenjing Jiang, Qing Zhao
Microelectromechanical system (MEMS) focal plane array (FPA) with optical readout offers exciting opportunities for real-time terahertz (THz) imaging. However, conventional FPA suffers from a low THz absorption ratio, which further decreases the performance of THz imaging. Here, we present a simple and scalable approach for the realization of THz focal plane metamaterial array with a relatively high absorption ratio. The key idea is to combine the advantages of substrate-free structures with metamaterial. A 100 x100 THz FPA with a 150 x 150 {\mu}m pixel is designed, fabricated, and characterized. The dependence of the THz absorption ratio on the thickness of SiNx dielectric substrate film is investigated. The fabricated FPA exhibits a 90.6% resonant absorption at 1.36 THz, agreeing considerably with the theoretical simulation results. Our results imply that such a substrate-free THz focal plane metamaterial array enables the realization of THz imaging.

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