Tightly-confined and long Z-cut lithium niobate waveguide with ultralow-loss

Lithium niobate (LN) is a promising material for future complex photonic-electronic circuits, with wide applications in fields like data communications, sensing, optical computation, and quantum optics. There was a great step toward LN photonic integrated circuits (PICs) with the development of dry etching for low-loss LN on insulator (LNOI) waveguides. However, the versatility of the LN waveguide platform for applications like $\chi^3$ nonlinear devices and passive phase sensitive components, has not been fully utilized. The main challenges are the difficulty of making highly confined ultralow-loss waveguides and overcoming the strong material birefringence. Here, we developed a fabrication technology for an ultralow-loss, tightly-confined, dispersion-engineered LN waveguide. We demonstrated an ultra-low propagation loss of 5.8 dB/m in a decimeter-long LN spiral waveguide. We focused on Z-cut LN waveguides with TE mode to avoid the material birefringence. Aiming for $\chi^3$ nonlinear applications, we demonstrated the first all normal-dispersion (ANDi) based coherent octave-spanning supercontinuum frequency comb in integrated LN waveguide. Our ultralow-loss Z-cut LN long waveguide might be useful in on-chip narrow linewidth lasers, optical delay lines, and parametric amplifiers.