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Wafer-scale low-loss lithium niobate photonic integrated circuits

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posted on 2023-11-30, 20:08 authored by Kevin Luke, Prashanta Kharel, Christian Reimer, Lingyan He, Marko Loncar, Mian Zhang
Thin-film lithium niobate (LN) photonic integrated circuits (PICs) could enable ultrahigh performance in electro-optic and nonlinear optical devices. To date, realizations have been limited to chip-scale proof-of-concepts. Here we demonstrate monolithic LN PICs fabricated on 4- and 6-inch wafers with deep ultraviolet lithography and show smooth and uniform etching, achieving 0.27 dB/cm optical propagation loss on wafer-scale. Our results show that LN PICs are fundamentally scalable and can be highly cost-effective.

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